[D-1-2] Si Grain-Free Highly Conductive Microcrystalline SiC Films Prepared by Using Organic Silane Gas

K. Sasaki、T. Miyajima、H. Hosoya、S. Furukawa (1.Interdisciplinary Graduate School of Science and Engineering Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1993.D-1-2