[LC-2] Bonded Silicon-on-Sapphire Wafers

Takao Abe、Konomu Ohki、Ken Sunakawa、Katsuo Yoshizawa、Shinji Tanaka、Atuso Uchiyama、Yoshiaki Nakazato (1.Shin-Etsu Handotai and、2.Nagano Denshi)

https://doi.org/10.7567/SSDM.1993.LC-2