[LC-2] Bonded Silicon-on-Sapphire Wafers

Takao Abe, Konomu Ohki, Ken Sunakawa, Katsuo Yoshizawa, Shinji Tanaka, Atuso Uchiyama, Yoshiaki Nakazato (1.Shin-Etsu Handotai and, 2.Nagano Denshi)

https://doi.org/10.7567/SSDM.1993.LC-2