[PB-1-2] Suppression of Interfacial Boron Accumulation and Defect Density in Molecular Beam Epitaxial Silicon

Chi Sheng, Dawei Gong, Xin Wei, Fang Lu, Qinhua Wang, Henghui Sun, Xun Wang (1.Surface Physics Laboratory, Fudan University, 2.Physics Department, Fudan University)

https://doi.org/10.7567/SSDM.1993.PB-1-2