[PB-2-5] Poly-Si TFTs with LDD Structure Fabricated at Low Temperature

Minoru Matsuo, Satoshi Inoue, Tsutomu Hashizume, Hiroyuki Ohshima (1.Seiko Epson Corporation TFT/MIM Research Laboratory)

https://doi.org/10.7567/SSDM.1993.PB-2-5