[PB-2-7] Structural Dimension Effects of Plasma Hydrogenation on Low-Temperature Poly-Si TFT's

Y. S. Kim, K. Y. Choi, S. K. Lee, B. H. Min, Y. H. Kim, M. K. Han (1.Department of Electrical Engineering, Seoul National University, 2.Department of Electronic Materials Engineering, University of Suwon)

https://doi.org/10.7567/SSDM.1993.PB-2-7