[PB-2-7] Structural Dimension Effects of Plasma Hydrogenation on Low-Temperature Poly-Si TFT's

Y. S. Kim、K. Y. Choi、S. K. Lee、B. H. Min、Y. H. Kim、M. K. Han (1.Department of Electrical Engineering, Seoul National University、2.Department of Electronic Materials Engineering, University of Suwon)

https://doi.org/10.7567/SSDM.1993.PB-2-7