[PB-3-3] A New Recessed Channel MOSFET with Selectively Halo-Doped Channel and Deep Graded Source/Drain

Woo-Hyeong Lee, Young-June Park, Jong Duk Lee (1.Inter-University Semiconductor Research Center and Dept. of Electronics Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1993.PB-3-3