[PC-1-13] Effects of Hydrogen and Bias on Single-Crystal Al Growth on Vicinal Si by DC Magnetron Sputtering

Shin Yokoyama, Hiroshi Ichikawa, Yoshiyuki Ichikawa, Mitsumasa Koyanagi (1.Research Center for Integrated Systems, Hiroshima University)

https://doi.org/10.7567/SSDM.1993.PC-1-13