[PC-1-22] High-Reliability Lithography Performed by Ultrasonic and Surfactant-Added Developing System

T. Iwamoto、H. Shimada、S. Shimomura、M. Onodera、T. Ohmi (1.Department of Electronics, Faculty of Engineering, Tohoku University、2.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1993.PC-1-22