[PC-1-22] High-Reliability Lithography Performed by Ultrasonic and Surfactant-Added Developing System

T. Iwamoto, H. Shimada, S. Shimomura, M. Onodera, T. Ohmi (1.Department of Electronics, Faculty of Engineering, Tohoku University, 2.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1993.PC-1-22