[PC-1-26] Silicon Wafer Orientation Dependence of MOS Device Reliability

K. Nakamura、K. Ohmi、K. Yamamoto、K. Makihara、T. Ohmi (1.Department of Electronic Engineering, Faculty of Engineering, Tohoku University、2.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1993.PC-1-26