[PC-1-7] A Novel LOCOS-Type Isolation Technology Free of the Field Oxide Thinning Effect

T. Park, D. H. Ahn, Y. T. Seo, J. H. Ko, S. T. Ahn (1.Advanced Technology Center, Samsung Electronics Co. LTD.)

https://doi.org/10.7567/SSDM.1993.PC-1-7