[PC-1-7] A Novel LOCOS-Type Isolation Technology Free of the Field Oxide Thinning Effect T. Park、D. H. Ahn、Y. T. Seo、J. H. Ko、S. T. Ahn (1.Advanced Technology Center, Samsung Electronics Co. LTD.) https://doi.org/10.7567/SSDM.1993.PC-1-7
