Silicon MBE on Hydrogen Plasma Cleaned Substrates

E. Hammerl; W. Hansch; W. Kiunke; I. Eisele; J. Ramm; E. Beck

doi:https://doi.org/10.7567/SSDM.1993.S-I-1-3

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜 1993年9月1日
Makuhari Messe, Chiba, Japan

[S-I-1-3] Silicon MBE on Hydrogen Plasma Cleaned Substrates

E. Hammerl、W. Hansch、W. Kiunke、I. Eisele、J. Ramm、E. Beck (1.Institut fur Physik, Fakultat Elektrotechnik Universitat der Bundeswehr Munchen、2.Balzers Ltd.)

https://doi.org/10.7567/SSDM.1993.S-I-1-3

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