Silicon MBE on Hydrogen Plasma Cleaned Substrates

E. Hammerl; W. Hansch; W. Kiunke; I. Eisele; J. Ramm; E. Beck

doi:https://doi.org/10.7567/SSDM.1993.S-I-1-3

1993 International Conference on Solid State Devices and Materials

Aug 29, 1993 - Sep 1, 1993
Makuhari Messe, Chiba, Japan

[S-I-1-3] Silicon MBE on Hydrogen Plasma Cleaned Substrates

E. Hammerl, W. Hansch, W. Kiunke, I. Eisele, J. Ramm, E. Beck (1.Institut fur Physik, Fakultat Elektrotechnik Universitat der Bundeswehr Munchen, 2.Balzers Ltd.)

https://doi.org/10.7567/SSDM.1993.S-I-1-3

▲