[S-I-9-5] Tailorable Doping-Spike PtSi Infrared Detectors Fabricated by Si Molecular Beam Epitaxy

T. L. Lin, J. Park, T. George, S. Gunapala, E. W. Jones (1.Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology)

https://doi.org/10.7567/SSDM.1993.S-I-9-5