[S-IV-13] A New Stacked SMVP(Surrounded Micro Villus Patterning) Cell for 256 Mega and 1 Giga bit DRAMs

S. P. Sim, S. T. Kim, T. H. Ahn, W. S. Paik, J. Y. Noh, K. H. Kim, S. H. Kang, J. G. Lee, J. Y. Yoon, C. S. Choi, C. G. Hwang (1.Advanced Technology Development Center, Memory Division, Semiconductor Business, SAMSUNG Electronics Co. Ltd.)

https://doi.org/10.7567/SSDM.1993.S-IV-13