[S-IV-3] Electrical Characterization of RTN-Poly-Si/CVD-Ta2O5/CVD-TiN Stacked DRAM Capacitors

V. K. Mathews, G. S. Sandhu, N. Sandler, P. C. Fazan (1.Micron Semiconductor, Inc., 2.LAM Research Corporation)

https://doi.org/10.7567/SSDM.1993.S-IV-3