Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering

Isaku KANNO; Shigenori HAYASHI; Takeshi KAMADA; Masatoshi KITAGAWA; Takashi HIRAO

doi:https://doi.org/10.7567/SSDM.1993.S-IV-7

[S-IV-7] Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering

Isaku KANNO, Shigenori HAYASHI, Takeshi KAMADA, Masatoshi KITAGAWA, Takashi HIRAO (1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1993.S-IV-7

1993 International Conference on Solid State Devices and Materials

[S-IV-7] Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering