Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering

Isaku KANNO; Shigenori HAYASHI; Takeshi KAMADA; Masatoshi KITAGAWA; Takashi HIRAO

doi:https://doi.org/10.7567/SSDM.1993.S-IV-7

1993 International Conference on Solid State Devices and Materials

1993年8月29日〜 1993年9月1日
Makuhari Messe, Chiba, Japan

[S-IV-7] Preparation of Pb(Zr, Ti)O3 Thin Films on (Pb, La)TiO3 Buffer Layer by Multi-Ion-Beam Sputtering

Isaku KANNO、Shigenori HAYASHI、Takeshi KAMADA、Masatoshi KITAGAWA、Takashi HIRAO (1.Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.1993.S-IV-7

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