[A-11-4] Two-Dimensional Analysis of Interface State Induced Performance Degradation in LDD MOSFET's

T. Wang、C. Huang、T. E. Chang (1.Department of Electronics Engineering, Institute of Electronics National Chiao-Tung University、2.Technology Development Dept., Macronix International Co.)

https://doi.org/10.7567/SSDM.1994.A-11-4