[A-12-4] 256 Mbit High Density CMOS Non Volatile Memories Field Isolation by Using High Temperature Poly Buffer LOCOS(HTPBL)

S. Deleonibus, P. Spinelli, F. Vinet, M. Heitzmann, G. Guegan, C. Leroux (1.LETI(CEA-Technologies Avancees)-Department de Microelectronique)

https://doi.org/10.7567/SSDM.1994.A-12-4