[A-12-5] Highly Reliable Antifuse with TiSix/p-SiN/TiN Structure for 3.3 V Operated High Speed FPGA Application

Yoshimitsu Tamura、Hiroshi Shinriki、Tomohiro Ohta (1.LSI Research Laboratory, Kawasaki Steel Corp.)

https://doi.org/10.7567/SSDM.1994.A-12-5