[PA-1-2] Scaling Merits of Ultra Thin Film SOI/CMOSFET's for Low Power Dissipation

S. Warashina, O. Tsuboi, K. Sukegawa, N. Sato (1.Fujitsu Ltd. Process Development Dept.)

https://doi.org/10.7567/SSDM.1994.PA-1-2