[PA-1-3] Two-Dimensional Analytical Modeling of the LDD Condition Influence on Short-Channel Effects in SOI MOSFET's

H.-O. Joachim、Y. Yamaguchi、Y. Inoue、N. Tsubouchi (1.Mitsubishi Electric Corporation, ULSI Laboratory)

https://doi.org/10.7567/SSDM.1994.PA-1-3