[PA-4-10] Suppression of Leakage Current in Polysilicon NMOS Thin Film Transistors Using NH3 Annealing

Deuk-Sung Choi、Gi-Young Yang、Chul-Hi Han、Choong-Ki Kim (1.Department of Electrical Engineering, Korea Advanced Institute of Science Technology)

https://doi.org/10.7567/SSDM.1994.PA-4-10