[S-I-2-5] Anti-Phase Direct Bonding of InP and GaAs and Its Application to Semiconductor Lasers

Y. Okuno、K. Uomi、M. Aoki、T. Taniwatari、M. Suzuki、M. Kondow (1.Central Research Laboratory, Hitachi, Ltd.、2.Fiberoptics Division, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1994.S-I-2-5