Single Chip Integration of LED, Waveguide and Micromirrors

Takahiko NAGATA; Tohru NAMBA; Kouji MIYAKE; Takeshi DOI; Takahiro MIYAMOTO; Yasuhide KURODA; Shin YOKOYAMA; Seiichi MIYAZAKI; Mitsumasa KOYANAGI; Masataka HIROSE

doi:https://doi.org/10.7567/SSDM.1994.S-I-7-4

[S-I-7-4] Single Chip Integration of LED, Waveguide and Micromirrors

Takahiko NAGATA, Tohru NAMBA, Kouji MIYAKE, Takeshi DOI, Takahiro MIYAMOTO, Yasuhide KURODA, Shin YOKOYAMA, Seiichi MIYAZAKI, Mitsumasa KOYANAGI, Masataka HIROSE (1.Research Center for Integrated Systems, Hiroshima University, 2.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1994.S-I-7-4

1994 International Conference on Solid State Devices and Materials

[S-I-7-4] Single Chip Integration of LED, Waveguide and Micromirrors