[S-I-8-3] Direct Patterning of the Current Confinement Structure for p-Type Column-III Nitrides by Low-Energy Electron Beam Irradiation Treatment

M. Inamori, H. Sakai, T. Tanaka, H. Amano, I. Akasaki (1.Department of Electrical and Electronic Engineering, Meijo University, 2.Devices and Materials Department, Pioneer Electronic Corporation)

https://doi.org/10.7567/SSDM.1994.S-I-8-3