[B-6-2] Hot-Carrier Reliability of 0.1 μm Delta-Doped MOSFETs

Kenji NODA、Tetsuya UCHIDA、Toru TATSUMI、Chenming HU (1.ULSI Device Development Laboratories, NEC Corporation、2.Microelectronics Research Laboratories, NEC Corporation、3.Department of Electrical Engineering and Computer Science, University of California at Berkeley)

https://doi.org/10.7567/SSDM.1995.B-6-2