The Japan Society of Applied Physics

[B-6-2] Hot-Carrier Reliability of 0.1 μm Delta-Doped MOSFETs

Kenji NODA, Tetsuya UCHIDA, Toru TATSUMI, Chenming HU (1.ULSI Device Development Laboratories, NEC Corporation, 2.Microelectronics Research Laboratories, NEC Corporation, 3.Department of Electrical Engineering and Computer Science, University of California at Berkeley)

https://doi.org/10.7567/SSDM.1995.B-6-2