[C-2-1] Plasma Immersion Ion Implantation for Electronic Materials Applications

N. W. Cheung, W. En, J. Gao, S. S. Iyer, E. C. Jones, B. P. Linder, J. B. Liu, X. Lu, J. Min, B. Shieh (1.Plasma Assisted Materials Processing Laboratory Department of Electrical Engineering and Computer Sciences University of California)

https://doi.org/10.7567/SSDM.1995.C-2-1