[C-3-4] Extremely Low ON-Resistance Metal to Metal Antifuses with Al/p-SiN/Al Structure for Next Generation FPGAs

Yoshitaka Kimura、Yoshimitsu Tamura、Chie Tsutsui、Hiroshi Shinriki (1.Advanced Technology Research Section LSI division Kawasaki Steel Corp.)

https://doi.org/10.7567/SSDM.1995.C-3-4