[C-5-2] High-Efficiency Micromirrors and Branched Optical Waveguides on Si Chips

Tohru NAMBA, Akihito UEHARA, Takeshi DOI, Takahiko NAGATA, Yasuhide KURODA, Seiichi MIYAZAKI, Kentaro SHIBAHARA, Shin YOKOYAMA, Atsushi IWATA, Masataka HIROSE (1.Research Center for Integrated Systems, Hiroshima University, 2.Department of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1995.C-5-2