Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods

Satoshi Koyanagi; Masamichi Akazawa; Hideki Hasegawa

doi:https://doi.org/10.7567/SSDM.1995.C-5-3

[C-5-3] Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods

Satoshi Koyanagi, Masamichi Akazawa, Hideki Hasegawa (1.Research Center for Interface Quantum Electronics and Department of Electrical Engineering Hokkaido University)

https://doi.org/10.7567/SSDM.1995.C-5-3

1995 International Conference on Solid State Devices and Materials

[C-5-3] Contactless and Nondestructive Characterization of Silicon Surfaces by Capacitance-Voltage and Photoluminescence Methods