[C-6-2] Al-Selective CVD Induced by Hydrogen Desorption on Si

H. Sakaue, Y. Katsuta, S. Konagata, S. Shingubara, T. Takahagi (1.Dept. of Electrical Engineering, Hiroshima University)

https://doi.org/10.7567/SSDM.1995.C-6-2