[D-6-2] Single Voltage Supply High Efficiency InGaAs Pseudomorphic Double-Hetero HEMTs with Platinum Buried Gates

Takuma TANIMOTO、Isao OHBU、Satoshi TANAKA、Hidetoshi MATSUMOTO、Akihisa TERANO、Tohru NAKAMURA (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1995.D-6-2