[D-7-2] Photoellipsometry Characterization of In0.46Ga0.54P/n+-GaAs Heterostructures

Tadashi SAITOH, Kenichi WATANABE, Yi-Ming XIONG Fumiaki HYUGA (1.Division of Electronic and Information Engineering Tokyo University of Agriculture and Technology, 2.NTT LSI Laboratories)

https://doi.org/10.7567/SSDM.1995.D-7-2