[LB-L2] Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in MOSLSIs

Manabu Itsumi, Hideo Akiya, Takemi Ueki, Masato Tomita, Masataka Yamawaki (1.LSI Laboratories, NTT, 2.Interdisciplinary Research Laboratories, NTT)

https://doi.org/10.7567/SSDM.1995.LB-L2