[LB-L2] Octahedral-Structured Gigantic Precipitates as the Origin of Gate-Oxide Defects in MOSLSIs

Manabu Itsumi、Hideo Akiya、Takemi Ueki、Masato Tomita、Masataka Yamawaki (1.LSI Laboratories, NTT、2.Interdisciplinary Research Laboratories, NTT)

https://doi.org/10.7567/SSDM.1995.LB-L2