[PC-1-4] Electron Tunneling through Chemical Oxide of Silicon

Masanori MATSUDA, Kunihiro WATANABE, Masatoshi YASUTAKE, Takeo HATTORI (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology, 2.Scientific Instruments Division, Development Department, Seiko Instruments Inc.)

https://doi.org/10.7567/SSDM.1995.PC-1-4