[PC-1-4] Electron Tunneling through Chemical Oxide of Silicon

Masanori MATSUDA、Kunihiro WATANABE、Masatoshi YASUTAKE、Takeo HATTORI (1.Department of Electrical and Electronic Engineering, Musashi Institute of Technology、2.Scientific Instruments Division, Development Department, Seiko Instruments Inc.)

https://doi.org/10.7567/SSDM.1995.PC-1-4