[PC-10-2] X-Ray Topographic Investigations on Bonded Silicon on Insulator (BESOI) Wafers

Takao ABE, Hiroshi TAKENO, Koetsu SAWAI, Toshihiko TAKAMA (1.Shin-Etsu Handotai, 2.Faculty of Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1995.PC-10-2