[PC-10-2] X-Ray Topographic Investigations on Bonded Silicon on Insulator (BESOI) Wafers

Takao ABE、Hiroshi TAKENO、Koetsu SAWAI、Toshihiko TAKAMA (1.Shin-Etsu Handotai、2.Faculty of Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1995.PC-10-2