[PC-13-1] New Crystallization Process of LPCVD a-Si Films below 530℃ Using Metal Adsorption Method

Dong Kyun Sohn, Jeong No Lee, Byung Tae Ahn (1.Department of Materials Science & Engineering, Korea Advanced Institute of Science and Technology)

https://doi.org/10.7567/SSDM.1995.PC-13-1