[PC-13-5] Impact of a High Concentration Fluorine Layer on Carriers Transport at the Poly-Si/Si Interface

T. P. Chen、T. F. Lei、C. Y. Chang (1.Department of Electronics Engineering and Institute of Electronics National Chiao Tung University, and、2.National Nano Device Laboratory)

https://doi.org/10.7567/SSDM.1995.PC-13-5