[PC-13-5] Impact of a High Concentration Fluorine Layer on Carriers Transport at the Poly-Si/Si Interface

T. P. Chen, T. F. Lei, C. Y. Chang (1.Department of Electronics Engineering and Institute of Electronics National Chiao Tung University, and, 2.National Nano Device Laboratory)

https://doi.org/10.7567/SSDM.1995.PC-13-5