[PC-2-2] Quasi-Epitaxial Growth of PZT Thin Film to Fabricate Capacitor Suitable for 256Mb DRAM and Beyond

Satoshi YAMAUCHI, Masaki YOSHIMARU (1.VLSI R&D Center, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1995.PC-2-2