[PC-3-2] An Efficient Improvement for Barrier Effect of W-Filled Contact

Wen-Kuan Yeh, Ting-Chang Chang, Ming-Hsing Tsai, Sheng-Hsiung Chen, Kuang-Yang Chan, Mao-Chich Chen Mou-Shiung Lin (1.Department of Electronics Engineering, National Chiao Tung University and National Nano Device Laboratory, 1001 University Rd., 2.Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.1995.PC-3-2